About Us
ALD technology and functional device research team, school of microelectronics, Fudan University, concentrate on ALD technology and application research on more than 20 years, the team in the field of research interests include new ALD reaction and the growth process, ALD High - k film, ALD in the application of large scale integrated circuit copper interconnect barrier layer, ALD metal nanocrystals in the application of Flash memory, and the development of novel organic or organic/inorganic hybrid membranes using ALD/MLD processes , etc. Team members include professor Shijin Ding, leader of the research group, young researcher Dr. Wenjun Liu, associate researcher Dr. Xiaohan Wu and more than 10 postdocs, doctors and postgraduate students. The team has 5 sets of ALD equipment, including imported ALD equipment (Picosun) and domestic ALD equipment, suitable for all kinds of silicon wafers from 4 to 12 inches, which can be used for scientific research and industrial production pilot experiments.
We have a long term plan looking for post-doctors, doctors and master's students. At the same time, our team recruit young teachers with a background in microelectronics, processes and related disciplines. Outstanding scholars at home and abroad are welcome to join!
